microminiaturization
Concise Oxford English Dictionary © 2008 Oxford University Press:
microminiaturization /mʌɪkrəʊmɪnɪtʃərʌɪˈzeɪʃ(ə)n/ (or microminiaturisation)
▶noun the manufacture of extremely small electronic devices.
'microminiaturization' also found in these Oxford entries:

